FAQ
Klasifikace čistých prostor podle US FEDERAL STANDARD 209E
Maximální počet částic ve vzduchu |
|||||||||||
|
|
0.1 μm |
0.2 μm |
0.3 μm |
0.5 μm |
5 μm |
|||||
SI |
English |
(m3) |
(ft3) |
(m3) |
(ft3) |
(m3) |
(ft3) |
(m3) |
(ft3) |
(m3) |
(ft3) |
M 1 |
|
350 |
9.91 |
75.7 |
2.14 |
30.9 |
0.875 |
10.0 |
0.283 |
|
|
M 1.5 |
1 |
1,240 |
35.0 |
265 |
7.50 |
106 |
3.00 |
35.3 |
1.00 |
|
|
M 2 |
|
3,500 |
99.1 |
757 |
21.4 |
309 |
8.75 |
100 |
2.83 |
|
|
M 2.5 |
10 |
12,400 |
350 |
2,650 |
75.0 |
1,060 |
30.0 |
353 |
10.0 |
|
|
M 3 |
|
35,000 |
991 |
7,570 |
214 |
3,090 |
87.5 |
1,000 |
28.3 |
|
|
M 3.5 |
100 |
|
|
26,500 |
750 |
10,600 |
300 |
3,530 |
100 |
|
|
M 4 |
|
|
|
75,700 |
2,140 |
30,900 |
875 |
10,000 |
283 |
|
|
M 4.5 |
1,000 |
|
|
|
|
|
|
35,300 |
1,000 |
247 |
7.00 |
M 5 |
|
|
|
|
|
|
|
100,000 |
2,830 |
618 |
17.5 |
M 5.5 |
10,000 |
|
|
|
|
|
|
353,000 |
10,000 |
2,470 |
70.0 |
M 6 |
|
|
|
|
|
|
|
1,000,000 |
28,300 |
6,180 |
175 |
M 6.5 |
100,000 |
|
|
|
|
|
|
3,350,000 |
100,000 |
24,700 |
700 |
Upozornění: Federal standard 209E byl zrušen a nahrazen normou ISO 14644.